Biomedical Robotics and Biomicrosystems Lab



Teacher: Dino Accoto

Tutor: Mariateresa Francomano


Educational objectives

Application of knowledge and understanding: the student will be provided with the essential tools for conducting a design process oriented to the development of microsystems for biomedical applications. In particular, the student will be provided with both the theoretical (needed for the synthesis of microsystems) and technological (for the understanding of the fabrication steps) instruments related to the subject.

Autonomy in making judgments: Students will be encouraged to develop their critical and analytical skills, which are necessary for the proper setting of the design process. This goal will be achieved through the proposition of simple exercises, whose outcome is not closed.

Learning skills: The course adopts an approach based on the active involvement of the students in terms of personal study of selected topics recommended by the teacher, re-examination of key design skills developed in previous studies, and the application of the concepts learned in other specific areas.

Communication skills: The course aims at enabling students to develop the communication skills needed to work in modern multidisciplinary settings. This goal will be achieved by arousing pro-active involvement of the students during the teaching hours.




The first part of the course is focused on the analytical techniques for modeling miniaturized systems, and on the study of the physical phenomena of major importance in microengineering. Moreover, the properties of the materials most used in microtechnologies will be studied, with particular reference to silicon.

The second part of the course is devoted to the study of the main microfabrication technologies.

The last part of the course, supplemented by critical analysis of Biomicrosystems examples, explores the process of developing an innovative device, reviewing the equipment and tools available to the microtechnologist. The contents of the course are detailed as follows.


Part 1: Theoretical Foundations

- Dimensional analysis, scaling phenomena and design by similarity;

- Microfluidics;

- Principles of Electrokinetics;

- Properties of materials of interest in microengineering.


Part 2: Microtechnology

- Lithography

- Subtractive processes (wet and dry etching)

- Additive processes (oxidation, CVD, PVD, etc.).

- Introduction to: LIGA, micro-EDM, micro-stereolithography, micromolding, FIB / E-beam, laser machining;

- Polymers technologies.


Part 3: Development of microsystems

- Assembly technologies;

- Equipment and work environments (the clean room).


Lecture notes

Additional References:

  • M.MADOU, Fundamentals of Microfabrication , 2nd Edition/CRC Press, 2002/pp. 72.
  • W.WANG, S.SOPER, A./Bio-MEMS: Technologies and Applications/CRC Press, 2006 / pp.477.
  • S.SENTURIA, Microsystem Design, Springer, 2000 / pp.689.

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